Laser diagnostics and photochemical processing for semiconductor devices : symposium held November 1982 in Boston, Massachusetts, U.S.A.

著者

• Osgood, R. M.
• Brueck, S. R. J.
• Schlossberg, H. R.
• United States. Air Force. Office of Scientific Research

書誌事項

Laser diagnostics and photochemical processing for semiconductor devices : symposium held November 1982 in Boston, Massachusetts, U.S.A.

editors, R.M. Osgood, S.R.J. Brueck, and H.R. Schlossberg

（Materials Research Society symposium proceedings, v. 17）

North-Holland, c1983

注記

"Sponsored by the Air Force Office of Scientific Research"--T.p. verso

Includes bibliographical references and indexes

詳細情報

• NII書誌ID(NCID): BA03265606
• ISBN:
  • 0444007822
• LCCN: 83008028
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: New York
• ページ数/冊数: xiii, 298 p.
• 大きさ: 24 cm
• 分類:
  • LCC : TA1673
  • DC19 : 621.3815/2
• 件名:
  • LCSH : Lasers -- Industrial applications -- Congresses
  • LCSH : Semiconductors -- Congresses
• 親書誌ID:
  • BA00013775