Laser diagnostics and photochemical processing for semiconductor devices : symposium held November 1982 in Boston, Massachusetts, U.S.A.

書誌事項

Laser diagnostics and photochemical processing for semiconductor devices : symposium held November 1982 in Boston, Massachusetts, U.S.A.

editors, R.M. Osgood, S.R.J. Brueck, and H.R. Schlossberg

(Materials Research Society symposium proceedings, v. 17)

North-Holland, c1983

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注記

"Sponsored by the Air Force Office of Scientific Research"--T.p. verso

Includes bibliographical references and indexes

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