Micro electro mechanical systems : an investigation of micro structures, sensors, actuators, machines, and robots : proceedings
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Micro electro mechanical systems : an investigation of micro structures, sensors, actuators, machines, and robots : proceedings
IEEE, c1990
- タイトル別名
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90CH2832-4
MEMS
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注記
Proceedings of the 3rd IEEE Workshop on Micro Electro Mechanical Systems (MEMS) held in Napa Valley, California, 11-14 February 1990. Sponsored by the IEEE Robotics and Automation Society and in cooperation with the ASME Dynamic Systems and Control Division
IEEE Catalog Number 90CH2832-4
