Micro electro mechanical systems : an investigation of micro structures, sensors, actuators, machines, and robots : proceedings

Author(s)

• IEEE Workshop on Micro Electro Mechanical Systems

Bibliographic Information

Micro electro mechanical systems : an investigation of micro structures, sensors, actuators, machines, and robots : proceedings

IEEE

IEEE, c1990

Other Title

90CH2832-4

MEMS

Note

Proceedings of the 3rd IEEE Workshop on Micro Electro Mechanical Systems (MEMS) held in Napa Valley, California, 11-14 February 1990. Sponsored by the IEEE Robotics and Automation Society and in cooperation with the ASME Dynamic Systems and Control Division

IEEE Catalog Number 90CH2832-4

Details

• NCID: BA10650979
• LCCN: 89082431
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: New York, NY
• Pages/Volumes: xiii, 226 p.
• Size: 28 cm
• Classification:
  • LCC : IN PROCESS