Micro electro mechanical systems : an investigation of micro structures, sensors, actuators, machines, and robots : proceedings

著者

• IEEE Workshop on Micro Electro Mechanical Systems

書誌事項

Micro electro mechanical systems : an investigation of micro structures, sensors, actuators, machines, and robots : proceedings

IEEE

IEEE, c1990

タイトル別名

90CH2832-4

MEMS

注記

Proceedings of the 3rd IEEE Workshop on Micro Electro Mechanical Systems (MEMS) held in Napa Valley, California, 11-14 February 1990. Sponsored by the IEEE Robotics and Automation Society and in cooperation with the ASME Dynamic Systems and Control Division

IEEE Catalog Number 90CH2832-4

詳細情報

• NII書誌ID(NCID): BA10650979
• LCCN: 89082431
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: New York, NY
• ページ数/冊数: xiii, 226 p.
• 大きさ: 28 cm
• 分類:
  • LCC : IN PROCESS