Proceedings, IEEE micro electro mechanical systems : an investigation of micro structures,sensors, actuators, machines, and robots : Nara, Japan, 30 January-2 February 1991

著者

• IEEE Robotics and Automation Society
• Insitute of Electrical Engineers of Japan
• American Society of Mechanical Engineers. Dynamic Systems and Control Division
• IEEE Workshop on Micro Electro Mechanical Systems

書誌事項

Proceedings, IEEE micro electro mechanical systems : an investigation of micro structures,sensors, actuators, machines, and robots : Nara, Japan, 30 January-2 February 1991

sponsored by the IEEE Robotics and Automation Society, and incooperation with the IEE of Japan and the ASME Dynamic Systems and Control Division

IEEE, c1991

タイトル別名

Micro electro mechanical systems

91CH29579

MEMS

注記

Papers presented at the fourth IEEE Workshop on Micro Electro Mechanical Systems

"IEEE catalog number 91CH2957-9"

Title on spine: IEEE micro electro mechanical systems workshop

Includes bibliographical references and indexes

詳細情報

• NII書誌ID(NCID): BA11856914
• ISBN:
  • 0879426411
• LCCN: 90085702
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: New York, NY
• ページ数/冊数: xiv, 288 p.
• 大きさ: 30 cm
• 分類:
  • LCC : TK153
  • DC20 : 621.3
• 件名:
  • LCSH : Electromechanical devices -- Congresses
  • LCSH : Miniature objects -- Congresses
  • LCSH : Microelectronics -- Congresses
  • LCSH : Robotics -- Congresses