Proceedings, IEEE micro electro mechanical systems : an investigation of micro structures,sensors, actuators, machines, and robots : Nara, Japan, 30 January-2 February 1991

Author(s)

• IEEE Robotics and Automation Society
• Insitute of Electrical Engineers of Japan
• American Society of Mechanical Engineers. Dynamic Systems and Control Division
• IEEE Workshop on Micro Electro Mechanical Systems

Bibliographic Information

Proceedings, IEEE micro electro mechanical systems : an investigation of micro structures,sensors, actuators, machines, and robots : Nara, Japan, 30 January-2 February 1991

sponsored by the IEEE Robotics and Automation Society, and incooperation with the IEE of Japan and the ASME Dynamic Systems and Control Division

IEEE, c1991

Other Title

Micro electro mechanical systems

91CH29579

MEMS

Note

Papers presented at the fourth IEEE Workshop on Micro Electro Mechanical Systems

"IEEE catalog number 91CH2957-9"

Title on spine: IEEE micro electro mechanical systems workshop

Includes bibliographical references and indexes

Details

• NCID: BA11856914
• ISBN:
  • 0879426411
• LCCN: 90085702
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: New York, NY
• Pages/Volumes: xiv, 288 p.
• Size: 30 cm
• Classification:
  • LCC : TK153
  • DC20 : 621.3
• Subject Headings:
  • LCSH : Electromechanical devices -- Congresses
  • LCSH : Miniature objects -- Congresses
  • LCSH : Microelectronics -- Congresses
  • LCSH : Robotics -- Congresses