Proceedings, IEEE Micro Electro Mechanical Systems : an investigation of micro structures, sensors, actuators, machines and robots : Travemünde, Germany, 4 February - 7 February 1992

Author(s)

• IEEE Robotics and Automation Society
• Institute of Electrical and Electronics Engineers. German Section
• IEEE Workshop on Micro Electro Mechanical Systems
• Benecke, Wolfgang
• Petzold, H. -C.

Bibliographic Information

Proceedings, IEEE Micro Electro Mechanical Systems : an investigation of micro structures, sensors, actuators, machines and robots : Travemünde, Germany, 4 February - 7 February 1992

sponsored by the IEEE Robotics and Automation Society, and in cooperation with the German IEEE Section ; W. Benecke, H.-C. Petzold (eds.)

IEEE, 1992

• : soft.
• : case.
• : micro.

Other Title

92CH30932

Note

"IEEE catalog number 92CH3093-2"

Includes bibliographical references and indexes

Details

• NCID: BA18159475
• ISBN:
  • 0780304977
  • 0780304985
  • 0780304993
• LCCN: 91058683
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: [New York, NY]
• Pages/Volumes: xv, 240 p.
• Size: 30 cm
• Classification:
  • LCC : TK153
  • DC20 : 621.3
• Subject Headings:
  • LCSH : Electromechanical devices -- Congresses
  • LCSH : Miniature objects -- Congresses
  • LCSH : Microelectronics -- Congresses
  • LCSH : Robotics -- Congresses