Handbook of ion implantation technology

Author(s)

• Ziegler, J. F.

Bibliographic Information

Handbook of ion implantation technology

edited by J.F. Ziegler

North-Holland, 1992

Other Title

Ion implantation technology

Note

Includes bibliographical references and index

Details

• NCID: BA18974475
• ISBN:
  • 0444897356
• LCCN: 92027997
• Country Code: ne
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Amsterdam ; New York
• Pages/Volumes: vii, 700 p.
• Size: 25 cm
• Classification:
  • LCC : QC702.7.I55
  • DC20 : 530.4/16
• Subject Headings:
  • LCSH : Ion bombardment