Proceedings, IEEE Micro Electro Mechanical Systems : an investigation of micro structures, sensors, actuators, machines and systems : Fort Lauderdale, Florida, February 7-10, 1993

Author(s)

• IEEE Robotics and Automation Society
• American Society of Mechanical Engineers. Dynamic Systems and Control Division
• IEEE Workshop on Micro Electro Mechanical Systems

Bibliographic Information

Proceedings, IEEE Micro Electro Mechanical Systems : an investigation of micro structures, sensors, actuators, machines and systems : Fort Lauderdale, Florida, February 7-10, 1993

sponsored by the IEEE Robotics and Automation Society in cooperation with the ASME Dynamic Systems and Control Division

IEEE Service Center, c1993

• : soft.
• : case.
• : micro.

Other Title

93CH32656

MEMS

Note

"IEEE catalog number: 93CH3265-6"

Includes bibliographical references and indexes

Details

• NCID: BA20290847
• ISBN:
  • 078030957X
  • 0780309588
  • 0780309596
• LCCN: 92056273
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Piscataway
• Pages/Volumes: xvii, 294 p.
• Size: 28 cm
• Classification:
  • LCC : TK153
  • DC20 : 621.3
• Subject Headings:
  • LCSH : Electromechanical devices -- Congresses
  • LCSH : Miniature objects -- Congresses
  • LCSH : Microelectronics -- Congresses
  • LCSH : Robotics -- Congresses