Handbook of semiconductor wafer cleaning technology : science, technology, and applications

書誌事項

Handbook of semiconductor wafer cleaning technology : science, technology, and applications

edited by Werner Kern

Noyes Publications, c1993

大学図書館所蔵 件 / 5

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注記

Includes bibliographical references and index

内容説明・目次

内容説明

This book brings together into one volume all pertinent knowledge on semiconductor wafer cleaning and the scientific and technical disciplines associated directly or indirectly with this subject. The book provides the first comprehensive and up-to-date co

目次

Overview and Evolution of Semiconductor Wafer Contamination and Cleaning TechnologyTrace Chemical Contamination on Silicon SurfacesAqueous Cleaning ProcessesParticle Deposition and AdhesionOverview of Dry Wafer Cleaning ProcessesU

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