Handbook of semiconductor wafer cleaning technology : science, technology, and applications
著者
書誌事項
Handbook of semiconductor wafer cleaning technology : science, technology, and applications
Noyes Publications, c1993
大学図書館所蔵 全5件
注記
Includes bibliographical references and index
内容説明・目次
内容説明
This book brings together into one volume all pertinent knowledge on semiconductor wafer cleaning and the scientific and technical disciplines associated directly or indirectly with this subject. The book provides the first comprehensive and up-to-date co
目次
Overview and Evolution of Semiconductor Wafer Contamination and Cleaning TechnologyTrace Chemical Contamination on Silicon SurfacesAqueous Cleaning ProcessesParticle Deposition and AdhesionOverview of Dry Wafer Cleaning ProcessesU
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