Oxidation, diffusion and epitaxy

Author(s)

• Burger, R. M. (Robert M.)
• Donovan, R. P.

Bibliographic Information

Oxidation, diffusion and epitaxy

ed. by R.M. Burger and R.P. Donovan

（Solid state physical electronics series, . Fundamentals of silicon integrated device technology ; v. 1）（Prentice-Hall electrical engineering series）

Prentice-Hall, c1967

Details

• NCID: BA22478295
• LCCN: 67013671
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Englewood Cliffs, N.J.
• Pages/Volumes: xiv, 495 p.
• Size: 24 cm
• Parent Bibliography ID:
  • BA08050571
  • BA00107937