Scanning electron microscopy : physics of image formation and microanalysis
Author(s)
Bibliographic Information
Scanning electron microscopy : physics of image formation and microanalysis
(Springer series in optical sciences, v. 45)
Springer, c1998
2nd completely revised and updated ed
- : hardcover
Available at / 31 libraries
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INTERNATIONAL CHRISTIAN UNIVERSITY LIBRARY図
: hardcover549.8/R254s05374659,
549.8/R254s05374659 -
National Institutes of Natural Sciences Okazaki Library and Information Center図
: hardcover549.97/Sc9132610214
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The Institute for Solid State Physics Library. The University of Tokyo.図書室
: hardcover425.8:S5:45e7210142621
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Note
Includes bibliographical references and index
Description and Table of Contents
Description
Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interactions. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information.
Table of Contents
Electron Optics of a Scanning Electron Microscope.- Electron Scattering and Diffusion.- Emission of Backscattered and Secondary Electrons.- Electron Detectors and Spectrometers.- Image Contrast and Signal Processing.- Electron-Beam-Induced Current and Cathodoluminescence.- Special Techniques in SEM.- Crystal Structure Analysis by Diffraction.- Elemental Analysis and Imaging with X-Rays.
by "Nielsen BookData"