Scanning electron microscopy : physics of image formation and microanalysis

Bibliographic Information

Scanning electron microscopy : physics of image formation and microanalysis

Ludwig Reimer

(Springer series in optical sciences, v. 45)

Springer, c1998

2nd completely revised and updated ed

  • : hardcover

Available at  / 31 libraries

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Note

Includes bibliographical references and index

Description and Table of Contents

Description

Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interactions. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information.

Table of Contents

Electron Optics of a Scanning Electron Microscope.- Electron Scattering and Diffusion.- Emission of Backscattered and Secondary Electrons.- Electron Detectors and Spectrometers.- Image Contrast and Signal Processing.- Electron-Beam-Induced Current and Cathodoluminescence.- Special Techniques in SEM.- Crystal Structure Analysis by Diffraction.- Elemental Analysis and Imaging with X-Rays.

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