1998 3rd International Workshop on Statistical Metrology, June 7, 1998, Honolulu

著者

• International Workshop on Statistical Metrology
• IEEE Electron Devices Society

書誌事項

1998 3rd International Workshop on Statistical Metrology, June 7, 1998, Honolulu

IEEE Electron Devices Society

Institute of Electrical and Electronics Engineers, c1998

• :softbound
• :microfiche

タイトル別名

98EX113

注記

"IEEE cat. no. 98EX113."

Includes bibliographical references

sponsored by the IEEE EDS Society and the 1998 Symposium on VLSI Technology

内容説明・目次

内容説明

This workshop focused on issues such as the generalization and utilization of statistically significant measurements to characterise and validate VLSI processes, designs and equipment operations. Papers discuss areas including yield ramping methodology in pre-produciton phase.

「Nielsen BookData」 より

詳細情報

• NII書誌ID(NCID): BA46671201
• ISBN:
  • 0780343387
  • 0780343395
• LCCN: 97080378
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: [New York]
• ページ数/冊数: vi, 121 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TK7871.85
• 件名:
  • LCSH : Semiconductors -- Characterization -- Statistical methods -- Congresses
  • LCSH : Semiconductors -- Measurement -- Congresses