Technology of integrated circuits
Author(s)
Bibliographic Information
Technology of integrated circuits
（Advanced microelectronics, 2）
Springer, c2000
- : hbk
- Other Title
-
Technologie hochintegrierter Schaltungen
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Note
Includes bibliographical references and index
Description and Table of Contents
Description
This is the first book to comprehensively record the authors' authoritative knowledge and practical experience of IC manufacturing, including the tremendous developments of recent years. With its strong application orientation, this is a must-have book for professionals in semiconductor industries.
Table of Contents
1 Introduction.- 2 Basic principles of integrated circuits technology.- 3 Film technology.- 4 Lithography.- 5 Etching technology.- 6 Doping technology.- 7 Cleaning technology.- 8 Process integration.- References.
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