Technology of integrated circuits
著者
書誌事項
Technology of integrated circuits
（Advanced microelectronics, 2）
Springer, c2000
- : hbk
- タイトル別名
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Technologie hochintegrierter Schaltungen
大学図書館所蔵 件 / 全16件
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注記
Includes bibliographical references and index
内容説明・目次
内容説明
This is the first book to comprehensively record the authors' authoritative knowledge and practical experience of IC manufacturing, including the tremendous developments of recent years. With its strong application orientation, this is a must-have book for professionals in semiconductor industries.
目次
1 Introduction.- 2 Basic principles of integrated circuits technology.- 3 Film technology.- 4 Lithography.- 5 Etching technology.- 6 Doping technology.- 7 Cleaning technology.- 8 Process integration.- References.
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