Micro-electro-mechanical systems (MEMS) 2000 : presented at 2000 International Mechanical Engineering Congress and Exposition, November 5-10, 2000, Orland, Florida
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Micro-electro-mechanical systems (MEMS) 2000 : presented at 2000 International Mechanical Engineering Congress and Exposition, November 5-10, 2000, Orland, Florida
(MEMS, vol. 2)
American Society of Mechanical Engineers, c2000
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Micro electro mechanical systems 2000
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