2001 6th International Workshop on Statistical Methodology : IWSM, June 10, 2001, Kyoto

Author(s)

Bibliographic Information

2001 6th International Workshop on Statistical Methodology : IWSM, June 10, 2001, Kyoto

technical co-sponsored by IEEE Electron Devices Society ; co-sponsored by VLSI Symposium, the Japan Society of Applied Physics, IEEE ED Tokyo Chapter ; in cooperation with the Institute of Electronics, Information and Communication Engineers

Institute of Electrical and Electronics Engineers, c2001

  • : soft.

Other Title

IWSM

01TH8550

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Note

"IEEE cat. no. 01TH8550"

Includes bibliographical references

Description and Table of Contents

Description

The proceedings of the 6th International Workshop on Statistical Metrology, held in 2001. The papers cover: yield ramping methodology; metrology for statistical process control; sensor and measurement technology; spatial and temporal variation analysis methods; robust design; and more.

by "Nielsen BookData"

Details

  • NCID
    BA53798097
  • ISBN
    • 0780366883
  • LCCN
    00111492
  • Country Code
    us
  • Title Language Code
    eng
  • Text Language Code
    eng
  • Place of Publication
    Piscataway, N.J.
  • Pages/Volumes
    vi, 67 p.
  • Size
    28 cm
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