2001 6th International Workshop on Statistical Methodology : IWSM, June 10, 2001, Kyoto

著者

• International Workshop on Statistical Metrology
• IEEE Electron Devices Society
• VLSI Symposium
• 応用物理学会 オウヨウ ブツリ ガッカイ
• IEEE ED Tokyo Chapter
• 電子情報通信学会 デンシ ジョウホウ ツウシン ガッカイ

書誌事項

2001 6th International Workshop on Statistical Methodology : IWSM, June 10, 2001, Kyoto

technical co-sponsored by IEEE Electron Devices Society ; co-sponsored by VLSI Symposium, the Japan Society of Applied Physics, IEEE ED Tokyo Chapter ; in cooperation with the Institute of Electronics, Information and Communication Engineers

Institute of Electrical and Electronics Engineers, c2001

• : soft.

タイトル別名

IWSM

01TH8550

注記

"IEEE cat. no. 01TH8550"

Includes bibliographical references

内容説明・目次

内容説明

The proceedings of the 6th International Workshop on Statistical Metrology, held in 2001. The papers cover: yield ramping methodology; metrology for statistical process control; sensor and measurement technology; spatial and temporal variation analysis methods; robust design; and more.

「Nielsen BookData」 より

詳細情報

• NII書誌ID(NCID): BA53798097
• ISBN:
  • 0780366883
• LCCN: 00111492
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Piscataway, N.J.
• ページ数/冊数: vi, 67 p.
• 大きさ: 28 cm