2003 IEEE International Symposium on Semiconductor Manufacturing conference proceedings, September 30-October 2,2003, San Jose, California
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2003 IEEE International Symposium on Semiconductor Manufacturing conference proceedings, September 30-October 2,2003, San Jose, California
IEEE Service Center, c2003
- : softbound
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03CH37462
2003 IEEE International Symposium on Semiconductor Manufacturing, ISSM 2003, conference proceedings, September 30-October 2, 2003, San Jose, California
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Includes bibliographical references
"IEEE catalog number 03CH37462"--T.p. verso