2003 IEEE International Symposium on Semiconductor Manufacturing conference proceedings, September 30-October 2,2003, San Jose, California

著者

• IEEE International Symposium on Semiconductor Manufacturing
• Institute of Electrical and Electronics Engineers
• IEEE Electron Devices Society
• Components, Packaging & Manufacturing Technology Society
• Semiconductor Equipment and Materials International
• 応用物理学会 オウヨウ ブツリ ガッカイ

書誌事項

2003 IEEE International Symposium on Semiconductor Manufacturing conference proceedings, September 30-October 2,2003, San Jose, California

[sponsored by IEEE Electron Devices Society, IEEE Components Packaging and Manufacturing Technology Society, Semiconductor Equipment & Materials International (SEMI), and Society of Applied Physics of Japan]

IEEE Service Center, c2003

• : softbound

タイトル別名

03CH37462

2003 IEEE International Symposium on Semiconductor Manufacturing, ISSM 2003, conference proceedings, September 30-October 2, 2003, San Jose, California

注記

Includes bibliographical references

"IEEE catalog number 03CH37462"--T.p. verso

詳細情報

• NII書誌ID(NCID): BA65999008
• ISBN:
  • 0780378946
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Piscataway, N.J.
• ページ数/冊数: x, 521 p.
• 大きさ: 28 cm