Stress-induced phenomena in metallization : seventh international workshop on stress-induced phenomena in metallization : Austin, Texas, 14-16 June 2004

著者

• International Workshop on Stress-Induced Phenomena in Metallization
• Ho, P. S.
• Baker, Shefford P.
• Nakayama, Tomoji
• Volkert, Cynthia

書誌事項

Stress-induced phenomena in metallization : seventh international workshop on stress-induced phenomena in metallization : Austin, Texas, 14-16 June 2004

editors, Paul S. Ho ... [et al.]

（AIP conference proceedings, 741）

American Institute of Physics, c2004

注記

Another editors: Shefford P. Baker, Tomoji Nakamura, Cynthia A. Volkert

Includes indexes

内容説明・目次

内容説明

These proceedings contain new research results and advances in basic understanding of stress-induced phenomena in metallization. Papers cover results on electromigration, thermal stresses and void formation in copper-low k interconnect structures.

「Nielsen BookData」 より

詳細情報

• NII書誌ID(NCID): BA71166211
• ISBN:
  • 0735402256
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Melville, N.Y.
• ページ数/冊数: vii, 272 p.
• 大きさ: 25 cm
• 親書誌ID:
  • BA00284604