Electron-beam-induced nanometer-scale deposition

Author(s)

    • Silvis-Cividjian, Natalia
    • Hagen, Cornelis W.

Bibliographic Information

Electron-beam-induced nanometer-scale deposition

edited by Natalia Silvis-Cividjian, Cornelis W. Hagen

（Advances in imaging and electron physics / edited by Peter W. Hawkes, v. 143）

Elsevier Academic Press, c2006

Available at  / 16 libraries

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Note

Includes bibliographical references (p. 219-235) and index

Description and Table of Contents

Description

Advances in Imaging and Electron Physics merges two long-running serials-Advances in Electronics and Electron Physics and Advances in Optical and Electron Microscopy. This series features extended articles on the physics of electron devices (especially semiconductor devices), particle optics at high and low energies, microlithography, image science and digital image processing, electromagnetic wave propagation, electron microscopy, and the computing methods used in all these domains.

Table of Contents

Electron-Beam-Induced Nanometer-Scale Deposition (C.W. Hagen, N. Silvis-Cividjian). Introduction. Electron-Beam-Induced Deposition: A Literature Survey. The Theory of EBID Spatial Resolution. The Role of Secondary Electrons in EBID. Delocalization Effects in EBID. Conclusions. References. Index.

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    Available at 42 libraries

Details

  • NCID
    BA78424268
  • ISBN
    • 9780120147854
  • Country Code
    ne
  • Title Language Code
    eng
  • Text Language Code
    eng
  • Place of Publication
    Amsterdam ; Tokyo
  • Pages/Volumes
    xv, 247 p.
  • Size
    24 cm
  • Parent Bibliography ID
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