Fundamentals of microfabrication and nanotechnology

Author(s)

Bibliographic Information

Fundamentals of microfabrication and nanotechnology

Marc J. Madou

CRC Press, c2012

3rd ed

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Details

  • NCID
    BB06582045
  • ISBN
    • 9780849331800
  • Country Code
    us
  • Title Language Code
    eng
  • Text Language Code
    und
  • Place of Publication
    Boca Raton
  • Pages/Volumes
    3 v.
  • Size
    29 cm
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