From MEMS to Bio-MEMS and Bio-NEMS : manufacturing techniques and applications
Author(s)
Bibliographic Information
From MEMS to Bio-MEMS and Bio-NEMS : manufacturing techniques and applications
（Fundamentals of microfabrication and nanotechnology / Marc J. Madou, v. 3）
CRC Press, c2012
3rd ed
- : hardback
Available at / 26 libraries
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Faculty of Textile Science and Technology Library, Shinshu University図
: hardback549.9:Ma 25:32810324323,2810324356
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Note
Includes bibliographical references and index
"This third edition of Fundamentals of microfabrication"--P. [v]
