Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology
著者
書誌事項
Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology
(Fundamentals of microfabrication and nanotechnology / Marc J. Madou, v. 1)
CRC Press, c2012
3rd ed
- : hardback
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注記
Includes bibliographical references and index
内容説明・目次
内容説明
Providing a clear theoretical understanding of MEMS and NEMS, Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology focuses on nanotechnology and the science behind it, including solid-state physics. It provides a clear understanding of the electronic, mechanical, and optical properties of solids relied on in integrated circuits (ICs), MEMS, and NEMS. After exploring the rise of Si, MEMS, and NEMS in a historical context, the text discusses crystallography, quantum mechanics, the band theory of solids, and the silicon single crystal. It concludes with coverage of photonics, the quantum hall effect, and superconductivity. Fully illustrated in color, the text offers end-of-chapter problems, worked examples, extensive references, and a comprehensive glossary of terms.
Topics include:
Crystallography and the crystalline materials used in many semiconductor devices
Quantum mechanics, the band theory of solids, and the relevance of quantum mechanics in the context of ICs and NEMS
Single crystal Si properties that conspire to make Si so important
Optical properties of bulk 3D metals, insulators, and semiconductors
Effects of electron and photon confinement in lower dimensional structures
How evanescent fields on metal surfaces enable the guiding of light below the diffraction limit in plasmonics
Metamaterials and how they could make for perfect lenses, changing the photonic field forever
Fluidic propulsion mechanisms and the influence of miniaturization on fluid behavior
Electromechanical and optical analytical processes in miniaturized components and systems
The first volume in Fundamentals of Microfabrication and Nanotechnology, Third Edition, Three-Volume Set, the book presents the electronic, mechanical, and optical properties of solids that are used in integrated circuits, MEMS, and NEMS and covers quantum mechanics, electrochemistry, fluidics, and photonics. It lays the foundation for a qualitative and quantitative theoretical understanding of MEMS and NEMS.
目次
Historical Note: The Ascent of Silicon, MEMS, and NEMS. Crystallography. Quantum Mechanics and the Band Theory of Solids. Silicon Single Crystal Is Still King. Photonics. Fluidics. Electrochemical and Optical Analytical Techniques.
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