Thompson, L. F.

ID:DA02745817

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Thompson, Larry F.

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  • Polymers for microelectronics : resists and dielectrics

    Larry F. Thompson, editor, C. Grant Willson, editor, Seiichi Tagawa, editor

    American Chemical Society 1994 ACS symposium series 537

    Available at 8 libraries

  • Advances in resist technology and processing II : March 11-12, 1985, Santa Clara, California

    Larry F. Thompson, chairman/editor ; cooperating organization, the International Society for Hybrid Microelectronics

    SPIE--the International Society for Optical Engineering c1985 Proceedings / SPIE -- the International Society for Optical Engineering v. 539

    pbk.

    Available at 3 libraries

  • Materials for microlithography : radiation-sensitive polymers

    L.F. Thompson, editor, C.G. Willson, editor, J.M.J. Fréchet, editor ; based on a symposium cosponsored by the Division of Polymeric Materials, Science and Engineering and the Division of Polymer Chemistry, at the 187th Meeting of the American Chemical Society, St. Louis, Missouri, April 8-13, 1984

    The Society 1984 ACS symposium series 266

    Available at 17 libraries

  • Introduction to microlithography : theory, materials, and processing

    L.F. Thompson, editor, C.G. Willson, editor, M.J. Bowden, editor ; based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, Washington, March 20-25, 1983

    The American Chemical Society 1983 ACS symposium series 219

    Available at 15 libraries

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