Glow discharge processes : sputtering and plasma etching
著者
書誌事項
Glow discharge processes : sputtering and plasma etching
（A Wiley-Interscience publication）
Wiley, c1980
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注記
Includes bibliographical references and index
内容説明・目次
内容説明
Develops detailed understanding of the deposition and etching of materials by sputtering discharge, and of etching of materials by chemically active discharge. Treats glow discharge at several levels from basic phenomena to industrial applications--practical techniques diligently related to fundamentals. Subjects range from voltage, distributions encountered in plasma etching systems to plasma-electron interactions that contribute to sustaining the discharge.
目次
Gases.
Gas Phase Collision Processes.
Plasmas.
DC Glow Discharges.
RF Discharges.
Sputtering.
Plasma Etching.
Appendices.
Index.
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