Glow discharge processes : sputtering and plasma etching

Author(s)

• Chapman, Brian N.

Bibliographic Information

Glow discharge processes : sputtering and plasma etching

Brian Chapman

（A Wiley-Interscience publication）

Wiley, c1980

Note

Includes bibliographical references and index

Details

• NCID: BA00536398
• ISBN:
  • 047107828X
• LCCN: 80017047
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: New York
• Pages/Volumes: xv, 406 p.
• Size: 24 cm
• Classification:
  • NDC8 : 427.5
  • LCC : QC702.7.P6
  • DC : 537.5/2
• Subject Headings:
  • LCSH : Sputtering (Physics)
  • LCSH : Glow discharges
  • LCSH : Plasma etching
• Parent Bibliography ID:
  • BA00493885