Electron-beam-induced nanometer-scale deposition

著者

• Silvis-Cividjian, Natalia
• Hagen, Cornelis W.

書誌事項

Electron-beam-induced nanometer-scale deposition

edited by Natalia Silvis-Cividjian, Cornelis W. Hagen

（Advances in imaging and electron physics / edited by Peter W. Hawkes, v. 143）

Elsevier Academic Press, c2006

注記

Includes bibliographical references (p. 219-235) and index

内容説明・目次

内容説明

Advances in Imaging and Electron Physics merges two long-running serials-Advances in Electronics and Electron Physics and Advances in Optical and Electron Microscopy. This series features extended articles on the physics of electron devices (especially semiconductor devices), particle optics at high and low energies, microlithography, image science and digital image processing, electromagnetic wave propagation, electron microscopy, and the computing methods used in all these domains.

目次

Electron-Beam-Induced Nanometer-Scale Deposition (C.W. Hagen, N. Silvis-Cividjian). Introduction. Electron-Beam-Induced Deposition: A Literature Survey. The Theory of EBID Spatial Resolution. The Role of Secondary Electrons in EBID. Delocalization Effects in EBID. Conclusions. References. Index.

「Nielsen BookData」 より

詳細情報

• NII書誌ID(NCID): BA78424268
• ISBN:
  • 9780120147854
• 出版国コード: ne
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Amsterdam ; Tokyo
• ページ数/冊数: xv, 247 p.
• 大きさ: 24 cm
• 親書誌ID:
  • BA24211536