ID:DA0957428X
Symposium on Photomask Technology
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Brian J. Grenon, Frank E. Abboud, chairs/editors ; sponsored by BACUS--the International Technical Group of SPIE dedicated to the advancement of photomask technology ; published by SPIE--the International Society for Optical Engineering
SPIE c1998 Proceedings / SPIE -- the International Society for Optical Engineering v. 3546
Available at 1 libraries
James A Reynolds, Brian J. Grenon, chairs/editors ; sponsored by BACUS--the International Technical Group of SPIE dedicated to the advancement of photomask technology
SPIE c1998 Proceedings / SPIE -- the International Society for Optical Engineering v. 3236
Gilbert V. Shelden, James A. Reynolds., chairs/editors ; sponsored by BACUS
SPIE c1996 Proceedings / SPIE -- the International Society for Optical Engineering v. 2884
pbk.
William L. Brodsky, Gilbert V. Sheldon, chairs/editors ; sponsored by BACUS--the International Technical Group of SPIE dedicated to the advancement of photomask technology
SPIE c1994 Proceedings / SPIE -- the International Society for Optical Engineering v. 2322
Available at 2 libraries
sponsored by BACUS--the International Technical Group of SPIE dedicated to the advancement of photomask technology
SPIE c1993 Proceedings / SPIE -- the International Society for Optical Engineering v. 1809
