ID:DA06606302
Symposium on Cleaning Technology in Semiconductor Device Manufacturing, International
International Symposium on Wafer Cleaning Technology in Semiconductor Device Manufacturing
International Symposium on Semiconductor Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing
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editors, T. Hattori, R. E. Novak, J. Ruzyllo ; associate editors, P. Besson, P. Mertens ; sponsoring divisions, Electronics and Photonics
Electrochemical Society c2007 ECS transactions vol. 11, no. 2
: CD-ROM
Available at 1 libraries
editors, J. Ruzyllo ... [et al.] ; sponsoring divisions, Electronics and Photonics, Dielectric Science and Technology
Electrochemical Society c2005 ECS transactions vol. 1, no. 3
editors, J. Ruzyllo ... [et al.] ; sponsoring divisions: Electronics, Dielectric Science and Technology
Electrochemical Society c2004 Proceedings / [Electrochemical Society] v. 2003-26
editors, J. Ruzyllo ... [et al.]
Electrochemical Society c2002 Proceedings / [Electrochemical Society] v. 2001-26
editors, R.E. Novak ... [et al.] ; assistant editors, L. Shive ... [et al.]
Electrochemical Society c2000 Proceedings / [Electrochemical Society] v. 99-36
editors, Jerzy Ruzyllo ... [et al.] ; Electronics Division [of the Electrochemical Society]
Electrochemical Society c1998 Proceedings / [Electrochemical Society] v. 97-35
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edited by Jerzy Ruzyllo, Richard E. Novak ; [sponsored by the] Electronics and Dielectric Science and Technology Divisions
Electrochemical Society c1992 Proceedings / [Electrochemical Society] v. 92-12