Author(s)
Bibliographic Information
Microtechnology and MEMS
Springer
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1
- Advanced analytical methods in tribology
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Martin Dienwiebel, Maria-Isabel De Barros Bouchet, editors
Springer c2018 Microtechnology and MEMS
Available at 3 libraries
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2
- Piezo-electric electro-acoustic transducers
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Valeriy Sharapov, Zhanna Sotula, Larisa Kunickaya
Springer c2014 Microtechnology and MEMS
: [hardback]
Available at 1 libraries
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3
- Surface tension in microsystems : engineering below the capillary length
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Pierre Lambert editor
Springer c2013 Microtechnology and MEMS
Available at 1 libraries
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4
- Electromechanical systems in microtechnology and mechatronics : electrical, mechanical and acoustic networks, their interactions and applications
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Arno Lenk ... [et al.]
Springer c2011 Microtechnology and MEMS
Available at 1 libraries
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5
- Design and manufacturing of active microsystems
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Stephanus Büttgenbach, Arne Burisch, Jürgen Hesselbach, editors
Springer c2011 Microtechnology and MEMS
Available at 1 libraries
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6
- Thermal transport for applications in micro/nanomachining
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B.T. Wong, M.P. Mengüç
Springer c2008 Microtechnology and MEMS
Available at 1 libraries
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7
- Capillary forces in microassembly : modeling, simulation, experiments, and case study
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P. Lambert
Springer c2007 Microtechnology and MEMS
hdbk. : acidfree , pbk.
Available at 1 libraries
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8
- Capillary forces in microassembly : modeling, simulation, experiments, and case study
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P. Lambert
Springer c2007 Microtechnology and MEMS
: hbk
Available at 2 libraries
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9
- CMOS hotplate chemical microsensors
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M. Graf ... [et al.]
Springer c2007 Microtechnology and MEMS
Available at 2 libraries
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10
- Micromechanical photonics
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H. Ukita
Springer c2006 Microtechnology and MEMS
Available at 3 libraries
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11
- Fast simulation of electro-thermal MEMS : efficient dynamic compact models
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T. Bechtold, E.B. Rudnyi, J.G. Korvink
Springer c2007 Microtechnology and MEMS
Available at 4 libraries
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12
- CCD image sensors in deep-ultraviolet : degradation behavior and damage mechanisms
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F.M. Li, A. Nathan
Springer 2005 Microtechnology and MEMS
Available at 1 libraries
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13
- Integrated chemical microsensor systems in CMOS technology
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A. Hierlemann
Springer c2005 Microtechnology and MEMS
Available at 2 libraries
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14
- Force sensors for microelectronic packaging applications
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J. Schwizer, M. Mayer, O. Brand
Springer-Verlag c2005 Microtechnology and MEMS
Available at 2 libraries
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15
- Shape memory microactuators
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M. Kohl
Springer 2004 Microtechnology and MEMS
Available at 7 libraries
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16
- Silicon microchannel heat sinks : theories and phenomena
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L. Zhang, K.E. Goodson, T.W. Kenney
Springer c2004 Microtechnology and MEMS
hc : alk. paper
Available at 2 libraries
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17
- Laser diode microsystems
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Hans Zappe
Springer c2004 Microtechnology and MEMS
Available at 4 libraries
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18
- Modelling of microfabrication systems
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Raja Nassar, Weizhong Dai
Springer c2003 Microtechnology and MEMS
Available at 5 libraries
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19
- Micromachines as tools for nanotechnology
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H. Fujita (Ed.)
Springer c2003 Microtechnology and MEMS
Available at 11 libraries
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20
- CMOS cantilever sensor systems : atomic force microscopy and gas sensing applications
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D. Lange, O. Brand, H. Baltes
Springer-Verlag c2002 Microtechnology and MEMS
Available at 9 libraries