CiNii Books Author - American Vacuum Society

1

Microprocesses and nanotechnology 2003 : 2003 International Microprocesses and Nanotechnology Conference : October 29-31, 2003, Tokyo, Japan : digest of papers

sponsored by the Japan Society of Applied Physics ; technical-cosponsored [by] IEEE Electron Device Society ; cooperation, American Vacuum Society ... [et al.]

Business Center for Academic Societies Japan c2003

pbk.

Available at 1 libraries
2

2001 6th International Symposium on Plasma- and Process-Induced Damage, May 13-15, 2001, Monterey, California, USA

Manfred Engelhardt, Terence Hook, and Calvin T. Gabriel, ; technical co-sponsors, American Vacuum Society, IEEE/Electron Devices Society, Japanese Society of Applied Physics

American Vacuum Society - Northen California Chapter c2001

: soft.

Available at 1 libraries
3

Process control and diagnostics : 18-19 September 2000, Santa Clara, USA

Michael L. Miller, Kaihan A. Ashtiani, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SolidState Technology, the Electrochemical Society, [and] AVS--American Vacuum Society (USA)

SPIE c2000 Proceedings / SPIE -- the International Society for Optical Engineering v. 4182

Available at 1 libraries
4

Challenges in process integration and device technology : 18-19 September 2000, Santa Clara, USA

David Burnett, Shinʾichiro Kimura, Bhanwar Singh, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SolidState Technology, the Electrochemical Society, [and] AVS--American Vacuum Society (USA)

SPIE c2000 Proceedings / SPIE -- the International Society for Optical Engineering v. 4181

Available at 1 libraries
5

1999 4th International Symposium on Plasma Process-Induced Damage, May 9-11, 1999, Monterey, California, USA

editors, Thuy Dao, Mitsumasa Koyanagi, Terence Hook ; technical co-sponsors,IEEE/Electron Devices Society, American Vacuum Society, Japan Society of Applied Physics

the American Vacuum Society c1999

:softbound

Available at 1 libraries
6

Multilevel interconnect technology II : 23-24 September, Santa Clara, California

Mart Graef, Divyseh N. Patel, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, Solid State Technology ... [et al.]

SPIE c1998 Proceedings / SPIE -- the International Society for Optical Engineering v. 3508

Available at 1 libraries
7

1998 3rd International Symposium on Plasma Process-Induced Damage, June 4-5, 1998, Honolulu, Hawaii, USA

editors, Moritaka Nakamura, Thuy Dao, and Terence Hook ; technical co-sponsors, American Vacuum Society, IEEE/Electron Devices Society, Japan Society of Applied Physics

Northern California Chapter of the American Vacuum Society c1998

:softbound , :microfiche

Available at 1 libraries
8

Chemistry and physics of small-scale structures, February 9-11, 1997, Eldorado Hotel, Santa Fe, New Mexico

sponsored and managed by Optical Society of America

OSA c1997 Postconference ed Technical digest series 1997, v. 2

Available at 1 libraries
9

1996 1st International Symposium on Plasma Process-Induced Damage, 13-14 May 1996, Santa Clara, California, USA

Kim P. Cheung, Moritaka Nakamura, and Calvin T. Gabriel, editors ; technical co-sponsors, IEEE/Electron Devices Society, American Vacuum Society, Japanese Society of Applied Physics

Northern California Chapter of the American Vacuum Society c1996

:soft , :micro

Available at 1 libraries
10

Vacuum science and technology : pioneers of the 20th century

edited by Paul A. Redhead

Published for the American Vacuum Society by AIP Press c1994 History of vacuum science and technology v. 2

Available at 6 libraries
11

Extended abstracts of the 1994 International Conference on Solid State Devices and Materials, August 23-26, 1994, Yokohama, Pacifico Yokohama

sponsored by the Japan Society of Applied Physics ; in cooperation with the Institute of Electronics, Information and Communication Engineers of Japan ... [et al.]

Business Center for Academic Societies Japan c1994

Available at 4 libraries
12

Proceedings of the 36th International Symposium on Electron, Ion, and Photon Beams, 26-29 May 1992 The Peaboy Hotel, Orland, Glorida

special editor for the proceedings, Randy Kubena

Published for the American Vacuum Society by the American Institute of Physics 1992 Journal of vacuum science & technology B . vol. 10, no. 6

Available at 1 libraries
13

MicroProcess 91 : proceedings of the 1991 International MicroProcess Conference, July 15-18, 1991, Kanazawa, Japan

edited by S. Namba, T. Tsurushima

Publication Office, Japanese Journal of Applied Physics 1991 JJAP series 5

Available at 2 libraries
14

Surface science spectra

American Institute of Physics for the American Vacuum Society c1992-

Available at 16 libraries
15

Digest of papers 1991, 4th MicroProcess Conference, July 15-18, 1991, Kanazawa, Japan

Business Center for Academic Societies Japan c1991

Available at 1 libraries
16

Microphysics of surfaces : beam-induced processes : summaries of papers presented at the Microphysics of Surfaces, Beam-Induced Processes Topical Meeting, February 11-13, 1991, Santa Fe, New Mexico

cosponsored by Optical Society of America, American Vacuum Society

Optical Society of America c1991 Postconference ed Technical digest series 1991, v. 3

: hardcover

Available at 2 libraries
17

Proceedings of the 35th International Symposium on Electron, Ion, and Photon Beams, 28-31 May 1991 Seattle Sheraton Hotel & Towers, Seattle, Washington

special editor for the proceedings, Jane Shaw

Published for the American Vacuum Society by the American Institute of Physics 1991 special casebound ed.

Available at 1 libraries
18

MicroProcess 90 : proceedings of the 1990 International Symposium on MicroProcess Conference, July 16-19, 1990, Chiba, Japan

edited by S. Namba, T. Kitayama

Publication Office, Japanese Journal of Applied Physics 1991 JJAP series 4

Available at 3 libraries
19

Digest of papers 1990, 3rd MicroProcess Conference, July 16-19, 1990, Chiba, Japan

Publication Office, Business Center for Academic Societies Japan c1990

Available at 1 libraries
20

Digest of papers 1989, 2nd MicroProcess Conference, July 2-5, 1989, Kobe, Japan

Publication Office, Business Center for Academic Societies Japan c1989

Available at 1 libraries

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