James H. Smith, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [et al.]

SPIE c1998 Proceedings / SPIE -- the International Society for Optical Engineering v. 3511

Available at 2 libraries

M. Edward Motamedi, Hans Peter Herzig, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology ; cooperating organization Soild State Technology

SPIE c1997 Proceedings / SPIE -- the International Society for Optical Engineering v. 3226

Available at 1 libraries

Kevin Chau, Patrick J. French, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, [and] NIST--National Institute for Standards and Technology

SPIE c1997 Proceedings / SPIE -- the International Society for Optical Engineering v. 3224

Available at 1 libraries

Divyseh N. Patel, Mart Graef, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, the Electrochemical Society

SPIE c1997 Proceedings / SPIE -- the International Society for Optical Engineering v. 3214

Available at 1 libraries

Susan K. Jones, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations SEMI--Semiconductor Equipment and Materials International, SEMATECH

SPIE c1997 Proceedings / SPIE -- the International Society for Optical Engineering v. 3050

Available at 1 libraries

general chair, Don Millard

Institute of Electrical and Electronics Engineers , May be purchased from IEEE Service Center c1997

: softbound , : casebound

Available at 1 libraries

Michael T. Postek, Craig Friedrich, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology

SPIE 1996 Proceedings / SPIE -- the International Society for Optical Engineering v. 2880

Available at 1 libraries

Armando Iturralde, Te-Hua Lin, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [et al.]

SPIE c1996 Proceedings / SPIE -- the International Society for Optical Engineering v. 2876

Available at 1 libraries

Ali Keshavarzi, Sharad Prasad, Hans-Dieter Hartmann, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [et al.]

SPIE c1996 Proceedings / SPIE -- the International Society for Optical Engineering v. 2874

Available at 1 libraries

Stella W. Pang, Shih-Chia Chang, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology ; cooperating organizations, Solid State Technology, Sandia National Laboratories

SPIE--The International Society of Optical Engineering c1996 Proceedings / SPIE -- the International Society for Optical Engineering v. 2879

Available at 3 libraries