James H. Smith, Peter A. Krulevitch, Hubert K. Lakner, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Scandia National Laboratories (USA)
SPIE
c2003
Proceedings / SPIE -- the International Society for Optical Engineering
v. 4983
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